Thewater vapor oxidation is take the high pure water steam as theoxidizing atmosphere, responds the production silicon dioxide by thesilicon chip surface silicon atom and the hydrone.
水汽氧化是以高纯水蒸汽为氧化气氛,由硅片表面的硅原和水氧化硅。
Thewater vapor oxidation is take the high pure water steam as theoxidizing atmosphere, responds the production silicon dioxide by thesilicon chip surface silicon atom and the hydrone.
水汽氧化是以高纯水蒸汽为氧化气氛,由硅片表面的硅原和水氧化硅。
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