The method of two point probe focus is proposed to resolve the proble m of the jog of focus, and unitization processing is used to eliminate the chang e of laser power.
提出了采用两点探焦法刻划时焦点跳动问题,采用归一化处理消除光强波动对调焦精度影响。
The method of two point probe focus is proposed to resolve the proble m of the jog of focus, and unitization processing is used to eliminate the chang e of laser power.
提出了采用两点探焦法刻划时焦点跳动问题,采用归一化处理消除光强波动对调焦精度影响。
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