MEMS

The physical properities of cantilever, in particular the spring constant has important influence on the microcomponent of MEMS.

摘要悬臂梁的物理性能参尤其弹性MEMS微器件的性能有着重要的影响。

MEMS will be one of the most important realm of science in 21th century,and micropower which is a branch of MEMS directly relates to development of MEMS in some applied realm.

微机电统(MEMS)将21世纪最重要的研究领域之,而微能源器件MEMS其重要分支,其发展直接关到MEMS在某些领域的应用。